Summary
Deposition can be conceptually subdivided in several steps, and each of these steps will be discussed one by one: adsorption of atoms on the surface, the diffusion of atoms before they become incorporated into the films, the initial aggregation of the film materials (or nucleation). The further growth of the film and the microstructural and textural evolution.
Topics
- Adsorption: Physisorption and Chemisorption
- Surface diffusion
- Incorporation and nucleation
- Growth modes
- Nucleation: thermodynamics
- Nucleation: Kinetics
- Island shapes
- Influencing the kinetics
- Island growth and coalescence
- Ostwald ripening
- Sintering
- Cluster migration and Smoluchowski ripening
- The formation of polycrystalline films
- Grain coarsening and grain boundary migration
- The final film structure
- Structure zone diagrams
- Influence of impurities
Instructor
Diederik Depla
Professor, Head of Research Group
Dedicated Research on Advanced Films and Targets (DRAFT)
Ghent University
